| 摘要 |
PROBLEM TO BE SOLVED: To provide a position detection device capable of taking a wide measuring range and performing exact measurement even in an environment using a metal chip and water. SOLUTION: In the position detection device, a piston body 6 including a workpiece contactor 60 at a tip is fitted to a cylindrical body 5 fixed to a holder 21, the piston body 6 is floated by connecting an air supply device 7 including a pressure sensor 74 for detecting back pressure to the cylindrical body 5, and a plurality of air exhaust small holes 50 opened and closed by a lower end of the piston body 6 are formed at the cylindrical body 5. As a result, the position detection device performs position detection based on air supplied into the cylindrical body 5 and the number of the exhaust small holes 50 shielded by the lower end of the piston body 6, and thereby the measuring range can be widely taken, and the measurement can be performed without hindrance even in the environment using the metal chip and water caused by the detection by air. COPYRIGHT: (C)2010,JPO&INPIT
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