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发明名称
Verfahren zum Materialabtrag an Si-Festkörpern und dessen Verwendung
摘要
申请公布号
DE102006003605(B4)
申请公布日期
2010.09.30
申请号
DE200610003605
申请日期
2006.01.25
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;JOHANN WOLFGANG GOETHE-UNIVERSITAET FRANKFURT AM MAIN
发明人
MAYER, KUNO;BAUMANN, SYBILLE;KRAY, DANIEL;KOLBESEN, BERND O.
分类号
H01L21/302;B23K26/14;C23F1/04;H01L21/268
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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