SOL-GEL PRECURSOR LIQUID AND OXIDE DIELECTRIC FILM OBTAINED BY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a sol-gel precursor liquid in which a sol-gel precursor liquid film is formed by one application is thick and is also formed of desired oxide dielectric film thickness with the smallest number of repetitive application times as much as possible.

SOLUTION: Sol-gel precursor liquid is for forming a film consisting of oxide ceramic having a perovskite structure. Liquid includes: a first component system agent (solution comprising barium and/or strontium, which constitute a site A in the perovskite structure); and a second component system agent (solution containing a material obtained by partially hydrolyzing titanium alkoxide and adjusting a polymerization degree as a supply source of titanium constituting a site B of the perovskite structure).

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