| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical system and a laser beam machining apparatus that can fully make use of effect of a laser oscillator, that can arbitrarily set an inter-beam distance of multi-beams, and that facilitates optical axis alignment as well as easily changing machining conditions for each workpiece. <P>SOLUTION: The optical system includes: a laser light source 11; a diffraction optical element 12 on which light emitted from the laser light source 11 is made incident and which branches the incident light into a plurality of light beams; a condensing lens 13 for collecting the light branched in the diffraction optical element 12, at a plurality of places in accordance with the branching angle; a first beam diameter variable magnification optical system 14 that is arranged on an optical path on the light source side of the diffraction optical element 12 and that gives a first action of at least variably magnifying in one axis direction; and a second beam diameter variable magnification optical system 15 that is arranged on the optical path on the condensing lens 13 side of the diffraction optical element 12 and that gives a second action of canceling the first action. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
