发明名称
摘要 A method comprises providing a population of catalyst particles and growing a population of semiconductor nanowires catalytically from the population of catalyst particles. The nanowires of the population have a variation in diameter of less than about 20%, and the nanowires of the population have a smallest width less than 500 nanometers. Preferably the nanowires of the population have a variation in diameter of less than about 10%.
申请公布号 KR100984585(B1) 申请公布日期 2010.09.30
申请号 KR20087015375 申请日期 2001.08.22
申请人 发明人
分类号 H01L21/18;H01L29/73;B82B1/00;C30B11/00;C30B25/00;G01N27/12;G01N27/414;G01N33/543;G11C13/02;H01L21/329;H01L21/331;H01L23/532;H01L27/10;H01L29/06;H01L29/207;H01L29/267;H01L29/88;H01L33/06;H01L33/18;H01L51/00;H01L51/30 主分类号 H01L21/18
代理机构 代理人
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