| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a temperature control device for gas laser device, which can promote energy saving and compaction of the device. <P>SOLUTION: The temperature control device for gas laser device including discharge units 11a-14a which require high precision temperature control, and power supply units 11b-14b which require low precision temperature control as compared with the discharge units 11a-14a and allow temperature control of high temperature as compared with the discharge units 11a-14a controls the temperature of a plurality of laser devices. The temperature control device for gas laser device is further provided with a chiller 32 which produces cooling water used for temperature control of the discharge units 11a-14a, a chiller 31 which produces cooling water used for temperature control of the power supply units 11b-14b, the piping L2 which connects the chiller 32 in parallel with the discharge units 11a-14a, and the piping L1 which connects the chiller 31 in parallel with the power supply units 11b-14b. <P>COPYRIGHT: (C)2010,JPO&INPIT |
