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发明名称
Method of manufacturing group-III nitride crystal
摘要
申请公布号
EP1553216(A3)
申请公布日期
2010.09.29
申请号
EP20040030305
申请日期
2004.12.21
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.;MORI, YUSUKE
发明人
SASAKI, TAKATOMO;MORI, YUSUKE;YOSHIMURA, MASASHI;KAWAMURA, FUMIO;HIROTA, RYU
分类号
C30B29/38;C30B29/40;C30B9/00;C30B9/10;C30B11/00;C30B11/12;C30B19/02;H01L21/208
主分类号
C30B29/38
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代理人
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