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发明名称
摘要
申请公布号
JP4554075(B2)
申请公布日期
2010.09.29
申请号
JP20000531865
申请日期
1999.02.08
申请人
发明人
分类号
H01L21/205;H01L21/26;C23C16/458;H01L21/683;H01L21/687
主分类号
H01L21/205
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