A COMPRESSOR OF POLISHING PAD

摘要

PURPOSE: A polishing pad compressing device is provided to improve the compression efficiency of a polishing pad by uniformly compressing the surface of the polishing pad. CONSTITUTION: A compressor(40) moves while being compressed on the surface of a polishing pad(30). A rotating unit(50) rotates a plurality of compressing units at the same time. A support(44) supports the compressor to rotate with regard to a rotation plate(42). The compressor is eccentrically supported in the center of the rotation plate.