Method for producing semiconductor substrate,申请号EP20070008809-传众专利搜索

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发明名称	Method for producing semiconductor substrate
摘要
申请公布号	EP1863083(B1)	申请公布日期	2010.09.29
申请号	EP20070008809	申请日期	2007.04.30
申请人	SUMCO CORPORATION	发明人	MURAKAMI, SATOSHI;MORIMOTO, NOBUYUKI;NISHIHATA, HIDEKI;ENDO, AKIHIKO
分类号	H01L21/762	主分类号	H01L21/762
代理机构		代理人
主权项
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