发明名称 |
ASSEMBLING TABLE FOR SUBSTRATE |
摘要 |
PURPOSE: An assembling table for substrates is provided to easily implement processes with respect to the upper side and the lower side of the substrate by including a substrate fixing frame connected with a rotary shaft. CONSTITUTION: A substrate fixing frame(200) fixes substrates. The substrate fixing frame is connected with the rotary shaft to be rotatable on a base. The substrate fixing frame includes a frame main body(210), a first substrate supporting part(220), and a second substrate supporting part(230). The first substrate supporting part and the second substrate supporting part load and fix the substrates. A horizontal locking unit(110) fixes the substrate horizontally fixing the substrate fixing frame on the base.
|
申请公布号 |
KR20100105264(A) |
申请公布日期 |
2010.09.29 |
申请号 |
KR20090024202 |
申请日期 |
2009.03.20 |
申请人 |
VATECH CO., LTD. |
发明人 |
LEE, YOUNG HUN;MOON, JANG WON;LEE, JIN SIK |
分类号 |
H01L21/683;A61B6/00;H01L21/67 |
主分类号 |
H01L21/683 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|