发明名称 ASSEMBLING TABLE FOR SUBSTRATE
摘要 PURPOSE: An assembling table for substrates is provided to easily implement processes with respect to the upper side and the lower side of the substrate by including a substrate fixing frame connected with a rotary shaft. CONSTITUTION: A substrate fixing frame(200) fixes substrates. The substrate fixing frame is connected with the rotary shaft to be rotatable on a base. The substrate fixing frame includes a frame main body(210), a first substrate supporting part(220), and a second substrate supporting part(230). The first substrate supporting part and the second substrate supporting part load and fix the substrates. A horizontal locking unit(110) fixes the substrate horizontally fixing the substrate fixing frame on the base.
申请公布号 KR20100105264(A) 申请公布日期 2010.09.29
申请号 KR20090024202 申请日期 2009.03.20
申请人 VATECH CO., LTD. 发明人 LEE, YOUNG HUN;MOON, JANG WON;LEE, JIN SIK
分类号 H01L21/683;A61B6/00;H01L21/67 主分类号 H01L21/683
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