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经营范围
发明名称
METHOD FOR FABRICATION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100983514(B1)
申请公布日期
2010.09.27
申请号
KR20030043123
申请日期
2003.06.30
申请人
发明人
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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