| 摘要 |
PURPOSE: A composition for forming a film containing silicone is provided to obtain excellent storage stability, to have a large content of Si, to be used for forming the silicone-containing the film having superior adhesive force, and to stably form a resist pattern without a hemming. CONSTITUTION: A composition for forming a film containing silicone contains polysiloxane including a structure unit which is marked by chemical formula 1 and a structure unit which is marked by chemical formula 2, and an organic solvent. In chemical formula 1, R^1 is hydrogen or an electron-donating group and R^2 is an organic functional group. In chemical formula 1, n is 0 or 1. In chemical formula 2, R^3 is an alkyl group having a carbon number of 1-8 and R^4 is a monovalent organic functional group. |
