A TEMPLATE FOR NANO IMPRINT LITHOGRAPHY INCLUDING A COATING LAYER THEREON
摘要
<p>PURPOSE: A template for nano imprint lithography is provided to stably form a pattern by improving irradiation uniformity and reducing the loss of light. CONSTITUTION: An ultraviolet ray transmits a substrate. A stamp pattern(120) is formed on a substrate and has a sloped sidewall. A coating layer(130), which is formed in the sloped sidewall of the stamp pattern. The stamp pattern is formed in a convex and concave form in one region of the substrate.</p>
申请公布号
KR20100103211(A)
申请公布日期
2010.09.27
申请号
KR20090021716
申请日期
2009.03.13
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
PARK, CHANG MIN;GOO, DOO HOON;YEO, JEONG HO;PARK, JOO ON;KIM, IN SUNG;LEE, JEONG HOON
