| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polyimide silicone having a film excellent in fine pattern formation, film characteristics, and reliability as a protective film. <P>SOLUTION: The polyimide silicone, represented by formula (1), has a phenolic hydroxyl group in which a part or all of hydrogen atoms are substituted with an acid labile group, in the molecule. Wherein X is a tetravalent group and at least a part of which is a tetravalent organic group represented by formula (2) (wherein R<SP>1</SP>is a monovalent hydrocarbon group, R<SP>2</SP>is a trivalent group, and n is 1 to 120 on average), and Y is a divalent group, a group containing the phenolic hydroxyl group which experienced substitution with the acid labile group. <P>COPYRIGHT: (C)2010,JPO&INPIT |
