| 摘要 |
PURPOSE: A system for examining a mass-flow controller, a method for examining the same, and a recording media including an examination program are provided to implement an examination with respect to the mass-flow controller on each branch of a gas line by adding one gas line for an examination. CONSTITUTION: A gas pipe line system(GS) is connected with a gas bombe. A gas box includes branch gas lines(SL) with secondary side opening valve(SV). A control box(3) acquires measuring information from a differential pressure type controller(2) and a mass-flow controller(1). Based on the acquired measuring information, the control box sets the flow rate of gas. |
