| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical interference tomographic imaging method and apparatus for continuously joining tomographic images, which are obtained from a plurality of respective measuring regions, together. <P>SOLUTION: The optical interference tomographic imaging method is constituted so that the light from a light source is divided into measuring light and reference light and the tomographic image of an inspection target is obtained on the basis of the wavelength spectrum of the interference light of the return light, which is returned from the inspection target when the inspection target is irradiated with the measuring light, and the reference light and includes the step of dividing the inspection target into a plurality of the measuring regions adjacent to each other in the irradiation direction of the measuring light to obtain measuring images on the basis of the wavelength spectrum of the interference light at each measuring region, the step of correcting the contrast of the measuring images of the measuring regions at each measuring region, and the step of obtaining the tomographic images from the corrected measuring images at each measuring region. <P>COPYRIGHT: (C)2010,JPO&INPIT |
