| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chuck mechanism for conveying a carrier while holding it at an appropriate position relative to a guide rail in a conveying device. Ž<P>SOLUTION: The chuck mechanism for being carried in a predetermined direction (x-axis direction) by a driving mechanism while being magnetically connected with the end surface of the carrier includes an arm base fixed to the driving mechanism, a magnet part, held in a manner rotatable around a fulcrum of the arm base, arranged to face the end surface and an elastic member for regulating the rotation of the magnet for the fulcrum through its elastic force. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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