CARBON FILM COATED MEMBER, METHOD FOR FORMING CARBON FILM, AND CMP PAD CONDITIONER

摘要

<P>PROBLEM TO BE SOLVED: To provide a carbon film coated member in which the peeling strength of a carbon film to a substrate is enhanced and peeling can be prevented, and to provide a method for forming a carbon film and a conditioner for a CMP (chemical mechanical polishing) pad. Ž<P>SOLUTION: The carbon film coated member includes the substrate and the carbon film that covers the surface 1A of the substrate, wherein, a continuous groove 11 in a curved line is formed on the surface 1A. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž