| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape measuring machine and a probing apparatus for scanning form measurement capable of alleviating influence of disturbance vibration even with a simple and inexpensive configuration. Ž<P>SOLUTION: The probe 10 includes a case 11 supported by a Z-axis slider of a relative movement mechanism, a probe body 12 provided reciprocally movably inside the case, a force sensor 20 provided at a tip of the probe body, and a drive actuator 14 to reciprocally move the probe body. A vibrating element 17 capable of vibrating in the reciprocally moving direction of the probe body is provided between the case and the probe body. An offset vibration generating means 50 is provided which generates a vibration from the vibrating element 17 to offset the disturbance vibration transmitted to the probe body based on a force detection signal from the force sensor. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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