ACTUATOR, OPTICAL CONTROLLER, ELECTROOPTICAL DEVICE, AND ELECTRONIC EQUIPMENT

摘要

<P>PROBLEM TO BE SOLVED: To provide a compact actuator. Ž<P>SOLUTION: This actuator 200 has a first fixed electrode 11 and a second fixed electrode 12 constituted like comb-teeth on a substrate 18 and opposing to each other on their opened end sides and a movable electrode 13 being arranged between the first fixed electrode 11 and the second fixed electrode 12, being movable between the first fixed electrode 11 and the second fixed electrode 12, and having a meandering shape in plan view. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž