| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning method and a drawing method that can clean an opening end of an aperture member of impurities grown thereon. SOLUTION: The method for cleaning the shaping aperture member includes: a step of emitting a charged particle beam; and a step of deflecting the charged particle beam for the shaping aperture member, shaping the charged particle beam using a portion of the opening end, so that a plurality of areas each including a different portion of the opening end are irradiated with the charged electron beam in order. COPYRIGHT: (C)2010,JPO&INPIT |
