| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of a conventional probe card that reliable product inspection cannot be performed due to the effect of a fuse for an overcurrent protection measure, or the like. SOLUTION: A probe card includes a force terminal 105 to which first supply voltage is supplied, a probe needle 101 which supplies voltage based on the first supply voltage to a semiconductor integrated circuit being an inspection object, and the fuse 102 which is connected in series on a signal line connecting the force terminal 105 and the probe needle 101. Moreover, the card includes a fuse check circuit 104 which gives a voltage different from the first supply voltage supplied from the force terminal 105, to a node 119 on the signal line between the probe needle 101 and one end of the fuse 102. According to this circuit constitution, a state of connection of the fuse is checked before the product inspection, and therefore reliable semiconductor inspection is performed. COPYRIGHT: (C)2010,JPO&INPIT
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