SOLID-STATE IMAGING APPARATUS, METHOD OF MANUFACTURING THE SAME, AND IMAGING APPARATUS

摘要

PROBLEM TO BE SOLVED: To keep a spectral balance depending upon a difference in angle of divergence from a light exit end of a waveguide due to difference in wavelengths of respective colors.

SOLUTION: A solid-state imaging apparatus includes a substrate 11 provided with a pixel array portion 13 constituted of a plurality of pixels 12 each having a photoelectric conversion portion 21 for converting incident light into an electric signal, an interconnect layer 31 having a plurality of interconnects 32 laminated over the substrate 11 and an insulating layer 34 covering the plurality of interconnects 32, and the waveguide 14 formed in the interconnect layer 31 and guiding light to photoelectric conversion portions 21 of the plurality of pixels 12, the distance L between a light exit end 14E of the waveguide 14 from which light is emitted and a surface of a photoelectric conversion portion 21 receiving the light emitted from the waveguide 14 being made shorter in accordance with the wavelength of the light guided by the waveguide 14.

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