| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of increasing a deflection displacement of a diaphragm by effectively using a piezoelectric constant d<SB>15</SB>and to provide a liquid ejection head with the use of the piezoelectric element. <P>SOLUTION: The piezoelectric element includes a first electrode, a second electrode, a diaphragm and a piezoelectric material film and is so constituted that the piezoelectric material film is arranged between the first electrode and the second electrode and the diaphragm is disposed outside of the first electrode. In the piezoelectric element, one or more recessed portions are provided on the piezoelectric material film at a second electrode side, a third electrode is formed on an inner sidewall of the recessed portion, and the third electrode is connected to the second electrode. This liquid ejection head includes an individual liquid chamber communicating with an ejection nozzle for ejecting liquid and the piezoelectric element provided corresponding to the individual liquid chamber. <P>COPYRIGHT: (C)2010,JPO&INPIT |
