发明名称 LAMINATED STRUCTURE CONTAINING METAL THIN FILM
摘要 PROBLEM TO BE SOLVED: To provide a laminated structure containing a metal thin film, suitable for a chemical/biosensor using surface light reflection and capable of measuring a surface adsorption amount with high sensitivity. SOLUTION: The laminated structure containing the metal thin film for reflection spectrum measurement has the thin metal film formed on a substrate via an intermediate thin film layer. A surface abutting at least the intermediate thin film layer of the substrate and the metal thin film comprises a metal having a light absorption zone in a visible light region. For the intermediate thin film layer, the surface abutting the intermediate thin film layer of the substrate and the metal thin film comprise different materials. A reflection rate of incident light is reduced by multiple reflection between layers of the surface abutting the intermediate thin film layer of the substrate and the metal thin film. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010210520(A) 申请公布日期 2010.09.24
申请号 JP20090058611 申请日期 2009.03.11
申请人 TOKYO INSTITUTE OF TECHNOLOGY 发明人 KAWASAKI TAKEYOSHI;OKAHATA SHIGEO
分类号 G01N21/27 主分类号 G01N21/27
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