发明名称 REPLACEMENT GATE CMOS
摘要 A CMOS structure and a method for fabricating the CMOS structure include within a semiconductor substrate a first gate located over a first active region of a first polarity and a second gate located over a second active region of a second polarity different than the first polarity. The first active region and the second active region are separated by an isolation region. The first gate and the second gate are co-linear, with facing endwalls that terminate over the isolation region. The facing endwalls do not have a spacer located or formed adjacent or adjoining thereto, although sidewalls of the first gate and the second gate do. The CMOS structure may be fabricated using a sequential replacement gate method.
申请公布号 US2010237424(A1) 申请公布日期 2010.09.23
申请号 US20090407011 申请日期 2009.03.19
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHENG KANGGUO;YANG HAINING S.
分类号 H01L29/94;H01L21/8238 主分类号 H01L29/94
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