| 摘要 |
In a substrate processing apparatus, a processing module includes a processing unit for performing a predetermined processing on a substrate accommodated in a processing chamber, and a transfer module includes a transfer chamber having a loading/unloading port for mounting thereon a carrier accommodating therein the substrate in a plural number and a transfer mechanism for transferring the substrates between the processing module and the carrier mounted on the loading/unloading port in the transfer chamber. Further, a substrate accommodation unit includes a substrate accommodation chamber communicating with the transfer chamber via a transfer opening and accommodating therein the substrates arranged vertically, a vertically movable gate provided at the transfer opening, the gate separating the substrate accommodation chamber from the transfer chamber and a gas supply unit for supplying a gas into the substrate accommodation chamber. The substrates processed by the processing unit are accommodated in the substrate accommodation chamber. |
