| 摘要 |
Semiconductor devices, as well as stacked structures, packages, modules, and electronic apparatus including the semiconductor device, and methods of fabricating the same. The semiconductor device includes a circuit layer on a substrate, a metal interconnection layer on the circuit layer, the metal interconnection layer having a copper interconnection and a protection layer, a first and a second through silicon via plugs vertically penetrating the circuit layer, a first via pad on the first through silicon via plug, and a second via pad on the second through silicon via plug, wherein the first via pad is electrically connected to the copper interconnection, and wherein the second via pad is electrically insulated from the copper interconnection.
|
