| 摘要 |
An electrostatic actuator comprising: first and second comb arrays of electrodes arranged on a base, the electrodes of the first and second comb arrays being interleaved; a third comb array of electrodes spring mounted over the first and second comb arrays, the electrodes of the third comb array being aligned with the electrodes of the second comb array; and, means for applying a first voltage to the third comb array and a second voltage to the first and second comb arrays to generate an attractive force acting on the third comb array to move the third comb array toward the second comb array; wherein: the electrodes of the third comb array each have a thickness tj and a width a such that a≧tf, the electrodes of the second comb array each have a width b such that a≦̸b≦̸10a; the electrodes of the first and second comb arrays are separated by a distance d such that 0.5Z><d≦̸4b; and, the electrodes of the first comb array each have a width c such that 0.5b<c≦̸5b. Preferably, the means is adapted for applying the first voltage to the second and third comb arrays and the second voltage to the first comb array to generate a repulsive force acting on the third comb array to move the third comb array away from the second comb array. A method for modeling the design of a bi-directional electrostatic actuator is also provided.
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