Diode bolometer and a method for producing a diode bolometer

摘要

The bolometer has a base substrate (160), a semiconductor membrane (110) with a single-crystal section and spacers (150a,150b) to hold the semiconductor membrane in a predetermined distance (D) from the base substrate. The complementary doped areas (120a,120b) of the single crystal section form a diode and the predetermined distance (D) corresponds to a quarter of an infrared wavelength. The semiconductor membrane connects the spacer by two edge areas. An evaluation circuit is also provided and a part of the evaluation circuit is arranged in the base substrate. Independent claims are also included for the following: (1) a bolometer array with multiple bolometers; and (2) a method for manufacturing a bolometer.