发明名称 ROTARY SWITCHING VALVE
摘要 A rotary valve (1) includes a valve body (2) formed with a chamber communication passage (24) for flowing a main fluid and a vent communication passage (25) for discharging the main fluid and a cylindrical valve member (3) rotatably held in the valve body (2) and formed with a main passage (31) for flowing the main fluid. The cylindrical valve member (3) is rotated to switch the connection of the main passage (31) between the chamber communication passage (24) and the vent communication passage (25). The rotary switching valve (1) further includes a purge gas passage for passing purge gas in a clearance (11) between the valve body (2) and the cylindrical valve member (3), the purge gas being supplied to the clearance (11) to prevent the main fluid from leaking out of the main passage (31).
申请公布号 US2010229984(A1) 申请公布日期 2010.09.16
申请号 US20100712609 申请日期 2010.02.25
申请人 CKD CORPORATION;TOKYO ELECTRON LIMITED 发明人 OZAWA YUKIO;YAJIMA TAKASHI;OKABE TSUNEYUKI;OKURA SHIGEYUKI
分类号 F16K11/085 主分类号 F16K11/085
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