发明名称 THERMO-OPTIC DEVICES PROVIDING THERMAL RECIRCULATION
摘要 Thermo-optical devices providing heater recirculation in an integrated optical device are described. The thermo-optical devices include at least one waveguide having a non-linear path length in thermal communication with a thermal device. Methods of fabrication and use are also disclosed.
申请公布号 US2010233837(A1) 申请公布日期 2010.09.16
申请号 US20090557380 申请日期 2009.09.10
申请人 INFINERA CORPORATION 发明人 CHEN WEI;CHEN WENLU
分类号 H01L21/02 主分类号 H01L21/02
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