| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide machine and method for noncontact shape measuring, which solves such problems as heat generation of drive mechanism, increase in weight and size of probes, and achieves efficient measuring. Ž<P>SOLUTION: The noncontact shape measuring is equipped with: a noncontact probe 10; an XY stage 2 on which measuring objects W1/W2 are loaded; and a relative displacement mechanism for relatively moving these noncontact probe 10 and XY stage 2. The noncontact probe 10 includes a set of measuring means 11A/11B consisting of interferometers which emit length measured light L2 in coaxial direction away from each other, and use reflection of the above length measured light L2 reflected by the measuring objects W1/W2 to calculate the distance to the measuring objects W1/W2. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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