| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling apparatus capable of preventing a single crystal from becoming into a state having dislocation by suppressing the stay of flow of an inert gas around the outside of a lower end of a heat shield while suppressing a lowering of pulling up speed. SOLUTION: The pulling apparatus is equipped with a crucible 2 which stores a raw material melt 10, a heater 4 which surrounds the crucible 2, a cylindrical heat shield 8 which surrounds a single crystal 11 in being pulled up at the upper part of the crucible 2 and a chamber 1 in which the crucible 2, the heater 4 and the heat shield 8 are held and an inert gas is supplied from the upper part and discharged to the lower part, where a through-hole 15 is formed in the heat shield 8 and this through-hole 15 is structured by a channel which does not pass radiant heat toward the single crystal 11 in being pulled up from the heater 4 and the sidewall of the crucible 2. It is preferable that the through-hole 15 has an angle θ to a pulling-up shaft of 6 of 30° or less in the cross section including the pulling-up shaft 6 and its channel is linear, and the length D in radial direction centering on the pulling-up shaft is the thickness t of the heat shield 8 or less. COPYRIGHT: (C)2010,JPO&INPIT |
