发明名称 |
A METHOD OF FABRICATING A MULTILAYER STRUCTURE WITH CIRCUIT LAYER TRANSFER |
摘要 |
<p>A method of producing a composite structure comprises a step of producing a first layer of microcomponents (110) on one face of a first substrate (100), the first substrate being held flush against a holding surface (121a) of a first support (121) during production of said microcomponents (110), and a step of bonding the face of the first substrate (100) comprising the layer of microcomponents (110) onto a second substrate (200). During the bonding step, the first substrate (100) is held flush against a second support (221) the holding surface (221a) of which has a flatness that is less than or equal to that of the first support (120) used during production of the first layer of microcomponents (110).</p> |
申请公布号 |
WO2010102943(A1) |
申请公布日期 |
2010.09.16 |
申请号 |
WO2010EP52765 |
申请日期 |
2010.03.04 |
申请人 |
S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES;CASTEX, ARNAUD;BROEKAART, MARCEL |
发明人 |
CASTEX, ARNAUD;BROEKAART, MARCEL |
分类号 |
H01L21/762 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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