发明名称 |
CUTTING FLUID COMPOSITION FOR WIRESAWING |
摘要 |
The present invention provides an aqueous wiresaw cutting fluid composition that reduces the amount of hydrogen produced during a wiresaw cutting process. The composition is comprised of an aqueous carrier, a particulate abrasive, a thickening agent, and a hydrogen suppression agent. |
申请公布号 |
WO2010071875(A3) |
申请公布日期 |
2010.09.16 |
申请号 |
WO2009US68934 |
申请日期 |
2009.12.21 |
申请人 |
CABOT MICROELECTRONICS CORPORATION;GRUMBINE, STEVEN;NAGUIB, NEVIN |
发明人 |
GRUMBINE, STEVEN;NAGUIB, NEVIN |
分类号 |
C09K3/14;H01L21/304 |
主分类号 |
C09K3/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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