| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet type substrate conveyance apparatus whose structure can be made simple and which is reducible in occupation area. SOLUTION: The sheet type substrate conveyance apparatus 5 includes a first sheet band 45, a second sheet band 46, a first moving-forward/backward mechanism, a second moving-forward/backward mechanism, an integral moving mechanism, a relative moving mechanism, and a sheet band moving mechanism. The first moving-forward/backward mechanism can move the first sheet band 45 forward and backward in a first horizontal direction D1. The second moving-forward/backward mechanism can move the second sheet band 46 forward and backward in a second horizontal direction D2 in direct opposition to the first horizontal direction D1. The integral moving mechanism can move the first and second sheet bands 45 and 46 in one body in a perpendicular direction. The relative moving mechanism can move the first and second sheet bands 45 and 46 relatively in the perpendicular direction. The sheet band moving mechanism can move the first and second sheet bands 45 and 46 in one body in an X direction. COPYRIGHT: (C)2010,JPO&INPIT |
