发明名称 |
MULTI-ARRAYED DIAMOND TOOL-TIP AND MANUFACTURING METHOD OF THE SAME |
摘要 |
<p>PURPOSE: A multi-arrayed diamond tool tip and a manufacturing method thereof are provided to obtain desired surface quality of a product according to the material of work pieces by adjusting the shape, size and arrangement of tips. CONSTITUTION: A method for manufacturing a multi-arrayed diamond tool tip comprises steps of: forming a predetermined pattern on the surface of silicon(12) having a certain size and thickness, coating an oxide film(14) on the pattern surface, etching the silicon with the oxide film to form a tip forming groove(16) having a certain depth on the uncoated surface of the silicon, removing the oxide film coated on the pattern surface to obtain a silicon mold(18) with the tip forming groove, depositing diamond powder(20) on the surface and the tip forming groove of the silicon mold through CVD(Chemical Vapor Deposition) method, and etching and removing the silicon mold using potassium hydroxide solution.</p> |
申请公布号 |
KR20100100499(A) |
申请公布日期 |
2010.09.15 |
申请号 |
KR20090019421 |
申请日期 |
2009.03.06 |
申请人 |
PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION |
发明人 |
CHOI, SOO CHANG;KIM, YONG WOO;LEE, DUEG WOO;KIM, YONG IL |
分类号 |
C23C16/27;B23P15/28;C23F1/24;H01L21/027 |
主分类号 |
C23C16/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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