发明名称 POSITIONING DEVICE TO POSITION ONE OR MORE PLATES FOR ELECTRONIC CIRCUITS IN A METAL DEPOSITION UNIT, AND RELATED METHOD
摘要 <p>A positioning device to position one or more plates of electronic circuits with respect to an operating unit. The device comprises a rotary member which rotates selectively between a first operating position and a second operating position, and a positioning member mounted on the rotary member. The positioning member comprises a frame, which is mounted removably on the rotary member, and a strip of transpirant material on which each plate is rested. The strip is wound between a pair of winding/unwinding rollers, pivoted on the frame. The positioning member also comprises heating means able to heat the wafer to take it to a determinate operating temperature.</p>
申请公布号 KR20100100822(A) 申请公布日期 2010.09.15
申请号 KR20107011273 申请日期 2008.03.05
申请人 APPLIED MATERIALS ITALIA SRL CON UNICO SOCIO 发明人 BACCINI ANDREA
分类号 B41F15/26;H01L21/677;H01L21/683;H05K3/12 主分类号 B41F15/26
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