发明名称 |
POSITIONING DEVICE TO POSITION ONE OR MORE PLATES FOR ELECTRONIC CIRCUITS IN A METAL DEPOSITION UNIT, AND RELATED METHOD |
摘要 |
<p>A positioning device to position one or more plates of electronic circuits with respect to an operating unit. The device comprises a rotary member which rotates selectively between a first operating position and a second operating position, and a positioning member mounted on the rotary member. The positioning member comprises a frame, which is mounted removably on the rotary member, and a strip of transpirant material on which each plate is rested. The strip is wound between a pair of winding/unwinding rollers, pivoted on the frame. The positioning member also comprises heating means able to heat the wafer to take it to a determinate operating temperature.</p> |
申请公布号 |
KR20100100822(A) |
申请公布日期 |
2010.09.15 |
申请号 |
KR20107011273 |
申请日期 |
2008.03.05 |
申请人 |
APPLIED MATERIALS ITALIA SRL CON UNICO SOCIO |
发明人 |
BACCINI ANDREA |
分类号 |
B41F15/26;H01L21/677;H01L21/683;H05K3/12 |
主分类号 |
B41F15/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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