| 摘要 |
<p>PURPOSE: A manufacturing method of an optical absorber film is provided to manufacture a compound thin film inexpensively and safely using small amount of expensive VI family compound such as selenium during annealing, not using toxic gas in a manufacturing process. CONSTITUTION: A I family thin film is formed by depositing I family compound on the top of a substrate(S100). A I2-VI thin film is formed by depositing VI group compound on the surface of the I family thin film(S200). A III-VI family thin film is formed by depositing III-VI group element on the I2-VI family thin film(S300). The substrate forming III-VI family thin film is annealed in the VI group element(S400).</p> |
