PLASMA GENERATION APPARATUS FOR UNIFYING POWER TERMINAL AND PLASMA ELECTRODE

摘要

PURPOSE: A plasma generation apparatus integrating a final power terminal and a plasma generation electrode is provided to remarkably reduce the defect due to arcing by easily implementing the control to restrain the arcing phenomenon during the plasma generation process. CONSTITUTION: A power source and electrode integrated plasma generating device comprises a pulse generation circuit(510) and pulse transformers(PT1-PTn). The primary side of the pulse trans is in commonly connected to the output stage of the pulse generation circuit which is between the output terminal of a condenser(C) and a ground(GND).