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发明名称
POLISHING COMPOSITION
摘要
申请公布号
KR20100099679(A)
申请公布日期
2010.09.13
申请号
KR20107009372
申请日期
2008.09.29
申请人
NITTA HAAS INCORPORATED
发明人
MATSUSHITA TAKAYUKI;TERAMOTO MASASHI;NOJO HARUKI
分类号
C09K3/14;H01L21/304
主分类号
C09K3/14
代理机构
代理人
主权项
地址
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