发明名称 WIRESAW APPARATUS AND METHOD FOR CONTINUOUS REMOVAL OF MAGNETIC IMPURITIES DURING WIRESAW CUTTING
摘要 The invention provides a method and apparatus for removing magnetic or magnetized contaminants from a wiresaw cutting slurry during a wiresaw cutting process. The apparatus comprises a recirculating slurry dispensing system that defines the slurry flow pathway. The recirculating dispensing slurry system comprises a magnetic separator for removing magnetic or magnetizable contaminants from the slurry, wherein the purified slurry is discharged back into recirculation within the recirculating slurry dispensing system.
申请公布号 WO2010071868(A3) 申请公布日期 2010.09.10
申请号 WO2009US68901 申请日期 2009.12.21
申请人 CABOT MICROELECTRONICS CORPORATION;GRUMBINE, STEVEN;NAGARAJAN, RAMASUBRAMANYAM 发明人 GRUMBINE, STEVEN;NAGARAJAN, RAMASUBRAMANYAM
分类号 H01L21/301;H01L31/042 主分类号 H01L21/301
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