发明名称 TRANSFER APPARATUS AND TRANSFER METHOD
摘要 <p>Provided is a transfer apparatus for transferring a pattern to a subject to which the pattern is to be transferred. The transfer apparatus is provided with a mold holding section for holding a mold whereupon the pattern is formed; a supporting means for supporting the subject; a supporting means holding section having a first through hole which the supporting means penetrates; and a light irradiation means for irradiating light through the supporting means holding section. At least a part of the supporting means holding section overlapping with the irradiation path of the light has a light passing area which passes through the light irradiated from the light irradiation means.</p>
申请公布号 WO2010100712(A1) 申请公布日期 2010.09.10
申请号 WO2009JP53861 申请日期 2009.03.02
申请人 PIONEER CORPORATION;KASONO, OSAMU;IMAI, TETSUYA;HASHIMOTO, KAZUNOBU;FUJIWARA, CHIKASHI;OHTA, KEISUKE 发明人 KASONO, OSAMU;IMAI, TETSUYA;HASHIMOTO, KAZUNOBU;FUJIWARA, CHIKASHI;OHTA, KEISUKE
分类号 G11B5/84;H01L21/027 主分类号 G11B5/84
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