| 摘要 |
<p>Provided is an alternating current power supply for a sputtering apparatus, wherein arc discharge can be prevented from being induced by suppressing overvoltage generated when the polarity of each electrode is reversed. A bridge circuit (3) composed of a plurality of switching transistors (SW1-SW4) is provided between positive/negative direct current output lines (2a, 2b) arranged from a direct current power supply (1). An inductor (DCL) having direct current output as constant current characteristic is arranged on one of or both of the positive/negative direct current output lines (2a, 2b) which are arranged from the direct current power supply (1) to the bridge circuit (3), and a snubber circuit (7) is arranged parallel to the input (3a, 3b) of the bridge circuit (3).</p> |
