PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a projection optical system that can efficiently correct high-order unsymmetrical aberration in pupil depending on image height.

SOLUTION: The projection optical system 16 that projects an image of a first object 15 to a second object 17 includes a plurality of optical elements, a deformation means and a control unit 111. The deformation means deforms a deformable optical element LE satisfying a predetermined conditional formula included in the plurality of optical elements by applying a force to the deformable optical element LE. The control unit 111 controls the deformation unit, the deformable optical element LE has n fixed positions 203 on an outer circumference. The deformation unit includes n actuators 201. The n actuators 201 apply a forces to n positions on the outer circumference other than the fixed n positions 203. The control unit 111 controls each of the n actuators 201 independently.

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