| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analyzer mountable on a SEM, a TEM or the like, and measuring a plurality of elements simultaneously with high sensitivity and high resolution. SOLUTION: A lens 16 is arranged so that a focal point on the focusing end side of one multi-capillary X-ray lens 16 of a point/parallel type agrees with an electronic beam irradiation point 15 on a sample 14. Flat dispersive crystals 20, 23 are installed respectively on prolongations of each divided domains 16a, 16b acquired by dividing a cross section of the lens 16 into two, on the outward of parallel ends of the lens 16. An X-ray having a specific wavelength in X-rays subjected to wavelength dispersion by the flat dispersive crystal 20 is detected by an X-ray detector 22 corresponding to an ultralight element, and an An X-ray having a specific wavelength in X-rays subjected to wavelength dispersion by the other flat dispersive crystal 23 is detected by an X-ray detector 25 corresponding to a heavy element. Since one multi-capillary X-ray lens 16 is simply required to be disposed near the sample 14, much space is not required, and since characteristic X-rays discharged from the sample 14 can be detected simultaneously by different X-ray detectors 22, 25, simultaneous measurement of different elements is possible. COPYRIGHT: (C)2010,JPO&INPIT |
