| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for accurately inspecting possible foreign materials produced on a glass surface whereon microcircuit is vacuum-deposited. SOLUTION: The apparatus is designed so that each of laser beam irradiating sections for detecting the foreign materials on a glass substrate is provided on the upper side and the lower side of the glass substrate at regular intervals, respectively, while the light emitted from the laser beam irradiating section irradiated in a direction perpendicular to the transport direction of the glass substrate. COPYRIGHT: (C)2010,JPO&INPIT
|
