发明名称 PRESSURE DETECTION UNIT AND PRESSURE SENSOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a pressure detection unit which corrects an error caused by a change in temperature and whose temperature sensor consumes a small amount of current. Ž<P>SOLUTION: The pressure detection unit includes: a first piezoelectric vibrating reed 23 including a pair of vibrating arms 25a and 25b and base portions 24a and 24b respectively integrated with both ends of the pair of the vibrating arms; a second piezoelectric vibrating reed 26 having a vibrating arm 28 and a base portion 27 integrated with one end of the vibrating arm; a diaphragm 10 having a pair of supporting portions 13a and 13b to which the base portions 24a and 24b of the first piezoelectric vibrating reed 23 are bonded; and a base 15 disposed to be opposed to the diaphragm 10. In the pressure detection unit, the base portion 27 of the second piezoelectric vibrating reed 26 is joined to the base portion 24a of the first piezoelectric vibrating reed 23 in the same plane. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010197379(A) 申请公布日期 2010.09.09
申请号 JP20100003455 申请日期 2010.01.09
申请人 SEIKO EPSON CORP 发明人 SAKURAI TOSHINOBU;SATO KENTA
分类号 G01L9/00 主分类号 G01L9/00
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